Fibics Pattern
Step 3 - Mill Initial Trenches & Rough Polish
Using a large beam current for fast ion milling, two trenches are milled on either side of the tungsten that has been deposited above the area of interest. The trenches here have been milled so as to just touch the tungsten on either side, leaving a wall of material in the centre that is approximately two microns thick. The trenches themselves are approximately twenty microns wide, fourteen microns long and ten to fifteen microns deep.
Initial Trenches Ion Milled
Initial Trenches Ion Milled