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The last polishing step, again reducing the beam current, brings the membrane to a thickness of between 120
and 50 nanometres. At these thicknesses, the membrane is electron transparent, and will clearly display the
cross-section of the area of interest in a TEM. Milling on this nanometre scale demonstrates the precision that
FIB microscope-micromachining systems are capable of attaining. This site specificity and precision make FIB
systems very useful tools for TEM specimen preparation and any other milling on a microscopic scale.
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